Commonly Used Filtration Equipment & Filter Cartridge Selection for Semiconductor & Electronics Industry

Commonly Used Equipment

Sanitary precision cartridge filters, stainless steel high-purity filter housings

Bag filters for chemical liquid chemicals, acid & alkali resistant plastic filters

High-purity gas filters, compact inline precision pipeline filters

Special filters for CMP polishing slurry, terminal polishing filters for ultrapure water

HEPA / ULPA high-efficiency air filter modules

Mainstream Special Filter Cartridge Materials for Semiconductors

PTFE：Resistant to strong acids, strong alkalis and organic solvents; hydrophobic and air-permeable. Preferred material for chemical liquids and gas filtration.

PES：Low extractables, high flow rate. Ideal for ultrapure water and precision chemical solutions.

PP (Polypropylene)：General-purpose pre-filtration material with high cost performance.

Sintered Stainless Steel：High temperature resistant and regenerable. Applied to high-purity gas and high-temperature processes.

Nylon：Suitable for high-viscosity chemicals and fine clarification treatment.

Special Design Requirements for the Industry

Materials：316L stainless steel, PVDF, PPH and high-purity plastics with low ion leaching and zero extractables.

Structural Design：Dead-space-free construction, quick-install clamp connections, compatible with online CIP cleaning.

Corrosion Resistance：Compatible with hydrofluoric acid, sulfuric acid, hydrogen peroxide and various highly corrosive wet electronic chemicals.

Sealing Components：Imported fluororubber and perfluorinated seals featuring excellent chemical resistance and zero extractables.

Cleanliness Standards：Comply with high-purity cleanliness requirements for semiconductors, SEMI standards and cleanroom specifications.